VIDEO:
30 SECOND
PART BUILDER
EXPLAINED
XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- One-touch connection & release, requires no tools
- Lightweight & compact
- Auto switch capable
- XLAQ: single acting, normally closed, bellows seal
- XLAQ: flange sizes are 16, 25, 40, 50
- XLDQ: 2-step control, single acting
- XLDQ: flange sizes are 40, 50
How to order
Aluminum One-touch Connection and Release
High Vacuum Angle Valve
Normally Closed/Bellows Seal
XLAQ Series
How to Order
q w e r t y
q Flange size
Size
16
25
40
50
t Number of auto switches/Mounting position
Symbol
Nil
A
B
C
Quantity
Without auto switch
2 pcs.
1 pc.
1 pc.
Mounting position
—
Valve open/closed
Valve open
Valve closed
•
Part numbers indicating changed seal material and leakage
Symbol
Nil
A
B
C
Changed
part
None
w, e
w
e
Leakage Pa·m
3
/s or less
Note 1)
Internal
1.3 x 10
-10
(FKM)
1.3 x 10
-8
1.3 x 10
-8
1.3 x 10
-10
(FKM)
External
1.3 x 10
-10
(FKM)
1.3 x 10
-8
1.3 x 10
-10
(FKM)
1.3 x 10
-8
y Body surface treatment/Seal material and its changed part
•Sealmaterial
Symbol
Nil
N1
Q1
R1
R2
R3
S1
T1
U1
P1
Seal material
FKM
EPDM
Barrel
Perfluoro
®
Kalrez
®
Chemraz
®
VMQ
FKM for Plasma
ULTIC
ARMOR
®
Compound no.
1349-80
∗
2101-80
∗
70W
UA4640
4079
SS592
SS630
SSE38
1232-70
∗
3310-75
∗
w Indicator/Actuator port direction
Symbol
Nil
A
F
G
J
K
L
M
Indicator
Without indicator
Actuator port direction
With
indicator
Without
indicator
Flange side
Flange side
Left flange surface
Rear flange surface
Right flange surface
Left flange surface
Rear flange surface
Right flange surface
∗ Produced by Mitsubishi Cable Industries, Ltd.
Symbol
Nil
Auto switch part no.
Without auto switch (Without built-in magnet)
Remarks
Solid state auto switch
Without auto switch (With built-in magnet)
Reed auto switch (Not applicable
to flange size 16)
Left flange surface
Right flange surface
Flange side
Rear flange surface
r Auto switch type
To order something else “Nil” (standard), list the symbols starting with
“X”, followed by each symbol for "body surface treatment", "seal
material" and then “changed parts” at last.
XLAQ M9N16 A
E
V
L
A
V
M
U
H
I
U
C
A
V
H
G
e Temperature specifications/Heater
Symbol
Nil
H0
H4
H5
Temperature
5 to 60°C
5 to 150°C
Heater
None
None
With 100°C heater
With 120°C heater
—
—
—
Applicable flange size
25 40 50
•Bodysurfacetreatment
Symbol
Nil
A
Surface treatment
External: Hard anodized Internal: Raw material
External: Hard anodized Internal: Oxalic acid anodized
16
Example) XLAQ-25-M9NA-
XAN1A
Note 2)
Auto switches are not applicable for high-temperature specifications
(Temperature specifications H0, H4, H5). Standard lead wire length is 0.5 m.
Add “L” to the end of the part number when 3 m is desired, “M” when 1 m, and
“Z” when 5 m.
Example) -M9NL
Note 1) Values at ambient temperatures, excluding gas permeation.
Note 2) Refer to parts number of “Construction” on the page 470 for changed
part. Number indicates parts number of “Construction” accordingly.
Note) Size 16 is not applicable for H4, H5, Size 25 not for H4.
M9N(M)(L)(Z)
M9P(M)(L)(Z)
M9B(M)(L)(Z)
A90(L)
A93(M)(L)(Z)
M9//
—
D-M9N(M)(L)(Z)
D-M9P(M)(L)(Z)
D-M9B(M)(L)(Z)
D-A90(L)
D-A93(M)(L)(Z)
—
Barrel Perfluoro
®
is a registered trademark of Matsumura Oil Co.,Ltd.
Kalrez
®
is a registered trademark of E. I. du Pont de Nemours and Company
or its affiliates.
Chemraz
®
is a registered trademark of Greene, Tweed & Co.
ULTIC ARMOR
®
is a registered trademark of Nippon Valqua Industries, Ltd.
469
XL
XLA
XLQ
XM
XY
D-
XVD
XSA
XGT
CYV
XLQ
b
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