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- AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)
AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)
Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
- Actuation control pressure isolated from process gas by two seals
- Body material: 316L SS secondary remelt
- High inlet pressure type: Standard Max. 2300 psig (15.9 MPa); HR: Max. 3000 psig (20.7MPa)
- Flow capacity: Standard to 400 slpm
- Ni-Cr-Mo alloy internals available for corrosion resistance
- 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less
How to order
Operating Parameters
Delivery pressure
Gas
Source pressure
Proof pressure (Inlet)
Burst pressure
Maximum control pressure
Ambient and operating temperature
Cv
Leak rate
Across the seat leak
Surface finish
Connections
Control pressure port
Bonnet port
Supply pressure effect
Installation
Internal volume
AP10PA
7 to 150 psig (0.05 to 1.0 MPa)
Select compatible materials of construction for the gas
Vacuum to 3500 psig (24.1 MPa)
∗
1)
5000 psig (34.5 MPa)
10000 psig (69 MPa)
150 psig (1.0 MPa)
-40 to 71 °C (No freezing)
∗
2)
0.09
2 x 10
-11
Pa·m
3
/sec
2 x 10
-10
Pa·m
3
/sec
∗
3)
4 x 10
-9
Pa·m
3
/sec
∗
4)
Ra max 15 µin. (0.4 µm) Option: 10 µin. (0.25 µm), 7 µin. (0.18 µm), 5 µin. (0.13 µm)
Face seal, Tube weld
NPT 1/8 inch
NPT 1/8 inch
0.38 psig (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 Mpa) source pressure drop
Bottom mount
0.49 in
3
(8 cm
3
)
∗1) Max. 300 psig (2.1 MPa) for PTFE seat.
∗2) -10 to 90 °C for Polyimide seat.
∗3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa).
∗4) Tested with Helium gas inlet pressure 1000 psig (7 MPa).
Specifications
Porting Configuration (Top view)
3PW
w q
r
2PW
w q
4PW
w q
r e
Inboard leakage
Outboard leakage
Series AP10PA
Pneumatic Actuation Pressure Regulator
Pressure gauge unit
∗
2)
No code
MPA
Unit
psig/bar
MPa
Code
∗2)
Pressure gauge unit MPa or
psig/bar selectable. However
under Japanese regulation,
only MPa is available in Japan.
How to Order
AP10 S FV4 FV4PA 2PW
Surface finish
No code
M
V
X
Surface finish Ra max
15 µin. (0.4 µm) Standard
10 µin. (0.25 µm)
7 µin. (0.18 µm)
5 µin. (0.13 µm)
Code
Ports
2PW
3PW
4PW
Ports
2 ports
3 ports
4 ports
Code
Connections (Inletq, Outletw)
Seat material
No code
VS
TF
Material
PCTFE (Standard)
Polyimide
∗
3)
PTFE
∗4) ∗5)
Code
∗3) Not available with SHP,
SH, H materials.
∗4) Source pressure rating
is limited to 300psig
(2.1MPa) or less.
∗5)
PTFE seats reduce seat
abrasion for flow cycle
application. Gas permeation is
greater with PTFE than PCTFE.
Port Number
q w e r
Delivery pressure
PA
Delivery pressure
7 to 150 psig (0.05 to 1.0 MPa)
Code
Gauge port (Inlete, Outletr)
No code
0
V3
L
1
2
4
10
40
No gauge port
-30 in.Hg to 30 psig
-30 in.Hg to 60 psig
-30 in.Hg to 100 psig
0 to 200 psig
0 to 400 psig
0 to 1000 psig
0 to 4000 psig
-0.1 to 0.2 MPa
-0.1 to 0.4 MPa
-0.1 to 0.7 MPa
0 to 1.4 MPa
0 to 3 MPa
0 to 7 MPa
0 to 28 MPa
Pressure gauge
∗
1)
psig/bar unit MPa unit
No pressure gauge
(Connections: 1/4 inch face seal male)
Code
∗1) Refer to gauge guide (P.1058) for
gauge specifications.
qIN wOUT eGauge port (Inlet) rGauge port (Outlet)
Option
No code
HF
Specification
Standard
(Cv:0.09)
High flow
(Cv:0.15)
∗
6)
Code
Material
Ni-Cr-Mo
alloy
Nozzle
316L SS
Diaphragm
316L SS
Ni-Cr-Mo
alloy
Poppet
316L SS
Ni-Cr-Mo
alloy
316L SS
secondary
remelt
Body
Ni-Cr-Mo
alloy
S
SHP
SH
H
Code
FV4
MV4
TW4
FV6
MV6
TW6
Connections
1/4 inch face seal (Female)
1/4 inch face seal (Male)
1/4 inch tube weld
3/8 inch face seal (Female)
3/8 inch face seal (Male)
3/8 inch tube weld
Code
Low flow
∗6) Full outlet pressure
rating may not be
achieved at all inlet
pressure.
¡Actuation control pressure isolated from process gas by two seals
¡Body material: 316L SS secondary remelt
¡High inlet pressure type: Max. 3500 psig (24.1 MPa)
¡Flow capacity Standard: to 30 slpm
HF (Option): to 120 slpm
¡Ni-Cr-Mo alloy internals available for corrosion resistance
¡100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa)
control pressure or less
1034
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