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- SL5400, Single Stage Regulator, Intermediate Flow
SL5400, Single Stage Regulator for Ultra High Purity, Intermediate Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Springless design (no poppet spring in the wetted area)
- Intermediate flow
How to order
Porting Configuration
e
2PW 3PW
wqwq
qIN wOUT eGauge port(Outlet)
¡For UHP gas delivery
¡Flow capacity Standard: to 30 slpm
HF (option): to 130 slpm
¡Body material: 316L SS secondary remelt
¡Hastelloy internals available for corrosion resistance
Series SL5200
Single Stage Compact Regulator for Ultra High Purity
Connections (Inletq, Outletw)
FV4
MV4
TW4
FV6
MV6
TW6
Connections
1/4 inch face seal (Female)
1/4 inch face seal (Male)
1/4 inch tube weld
3/8 inch face seal (Female)
3/8 inch face seal (Male)
3/8 inch tube weld
Code
How to Order
SL52 SM FV4 FV4
02 2PW
Surface finish
M
V
X
Surface finish Ra max
10 µin. (0.25 µm) Standard
7 µin. (0.18 µm)
5 µin. (0.13 µm)
Code
Ports
2PW
3PW
Ports
2 ports
3 ports
Code
Range options
∗
1)
No code
A
Specification
Standard
Sub-atmospheric
Code
∗1) Only available with SL5201.
Port Number
qwe
Material
S
SH
Body Poppet
316L SS
Hastelloy
®
C-22
Diaphragm
316L SS
Code
Seat material
No code
VS
Material
PCTFE (Standard)
Vespel
®
∗
4)
Code
∗4) Not available with SH
material.
Delivery pressure
01
02
06
10
Delivery pressure
0.5 to 30 psig (0.0034 to 0.2 MPa)
1 to 60 psig (0.007 to 0.4 MPa)
1 to 100 psig (0.007 to 0.7 MPa)
Code
0.5 to 10 psig (0.0034 to 0.07 MPa)
Sub-atmospheric (A):
100 mm Hg absolute to 10 psig
(-88 kPa to 0.07 MPa)
316L SS
secondary remelt
Operating Parameters
Delivery pressure
Gas
Source pressure
Proof pressure (Inlet)
Burst pressure
Ambient and operating temperature
Cv
Leak rate
Across the seat leak
Surface finish
Connections
Supply pressure effect
Installation
Internal volume
Mass
SL5201mmA
100 mm Hg absolute to 10 psig
(-88kPa to 0.07 MPa)
Select compatible materials of construction for the gas
Vacuum to 150 psig (1.0 MPa)
500 psig (3.4 MPa)
1000 psig (6.9 MPa)
–40 to 160°C (–40 to 71°C) (No freezing)
∗
1)
0.07
2 x 10
-11
Pa·m
3
/sec
2 x 10
-10
Pa·m
3
/sec
∗
2)
4 x 10
-9
Pa·m
3
/sec
∗
2)
Ra max 10 µin. (0.25 µm) Option: 7 µin. (0.18 µm), 5 µin. (0.13 µm)
Face seal, Tube weld
0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop
Bottom mount
0.19 in
3
(3.1 cm
3
)
0.99 lbs (0.45 kg)
∗
3)
SL5201
0.5 to 10 psig
(0.0034 to 0.07 MPa)
SL5202
0.5 to 30 psig
(0.0034 to 0.2 MPa)
SL5210
1 to 100 psig
(0.007 to 0.7 MPa)
SL5206
1 to 60 psig
(0.007 to 0.4 MPa)
Specifications
Option Other Parameters
HF
Cv
Supply pressure effect
0.15
0.50 psig (0.0035 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop
Option
High flow
Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are:
SL5201mmA
SL5201
SL5202 SL5210SL5206
Option
No code
HF
Specification
High flow
(Cv: 0.15)
Standard
(Cv: 0.07)
Code
∗1) 14 to 194°F (–10 to 90°C) for Vespel
®
seat.
∗2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa).
∗3) Mass, including individual boxed weight, may vary depending on
connections or options.
Inboard leakage
Outboard leakage
Gauge port (Outlete)
No code
0
FV4
V3
L
1
Connections or Pressure gauge
∗
2)
psig/bar unit MPa unit
No gauge port
1/4 inch face seal (Male)
1/4 inch face seal (Female)
No pressure
gauge
With
pressure
gauge
-30in.Hg to 30psig
-30in.Hg to 60psig
-30in.Hg to 100psig
-0.1 to 0.2 MPa
-0.1 to 0.4 MPa
-0.1 to 0.7 MPa
Code
∗2) Refer to gauge guide (P.94) for gauge specifications.
Pressure gauge unit
∗
3)
No code
MPA
Unit
psig/bar
MPa
Code
∗3) Pressure gauge unit MPa
or psig/bar selectable.
However under Japanese
regulation, only MPa is
available in Japan.
¡Sub-atmospheric pressure
delivery option
¡Springless design (No poppet
spring in the wetted area)
24
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