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- Precision Slide Tables for Clean Room - 11/13/22-MX*
- 13/22-MXQ, Precision Slide Tables (Recirculating Bearings) - Clean Room/Copper, Fluorine, Silicone-free Series
13/22-MXQ, Precision Slide Tables (Recirculating Bearings) - Clean Room/Copper, Fluorine, Silicone-free Series
The 13/22-MXQ, clean room precision slide table uses a specially treated Martensitic stainless steel for its table and guide block to isolate the load bearing from the movement of the dual rods and pison seals to reduce particle generation. A relief plate was added to the body to house relief bushings and a vacuum port to vacuum particles equally on both sides of the piston rods to prevent particle leakage. Silicon rubber dust covers and plugs have also been attached to the floating parts to prevent particles from leaking.
- Bore sizes: 6, 8, 12, 16, 20, 25 mm
- Repeatable positioning accuracy: +/-0.05mm
- Stroke adjuster options: rubber or metal stopper
- PTFE grease used in Clean Room Series
- Lithium grease used in Copper, Fluorine, Silicone-free Series
- RoHS compliant
- Auto switch capable
How to order
Nil
P
Note)
Functional option
Standard
Axial piping
Note) The combination of axial piping
and both ends adjusters or
retraction end adjuster is not
available.
Adjuster option
Nil
AS
AT
A
CS
CT
C
ASCT
CSAT
Without adjuster
Extension end adjuster
Retraction end adjuster
Both ends adjuster
Extension end metal stopper
Retraction end metal stopper
Both ends metal stopper
Extension end adjuster + Retraction end metal stopper
Extension end metal stopper + Retraction end adjuster
Series MXQ
How to Order
ø6, ø8, ø12, ø16, ø20, ø25
Air Slide Table
Auto Switch Specifications
(Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)
∗Lead wire length symbols: 0.5 m ........ Nil (Example) M9N
1 m ........... M (Example) M9NM
3 m ........... L (Example) M9NL
5 m ........... Z (Example) M9NZ
PLC: Programmable Logic Controller
Special
function
—
—
Electrical
entry
Grommet
Grommet
Indicator
light
Yes
Yes
Type
Reed auto switch
Solid state auto switch
Wiring
(Output)
2-wire
3-wire (NPN)
2-wire
12 V
In-line
A93
M9N
M9B
—
—
—
—
—
100 V
12 V
12 V
24 V
24 V
Load voltage
AC
DC
Lead wire length (m)
∗
0.5
(Nil)
1
(M)
3
(L)
—
5
(Z)
Applicable load
Auto switch model
Electrical entry direction
Relay, PLC
Relay, PLC
10, 20, 30, 40, 50
10, 20, 30, 40, 50, 75
10, 20, 30, 40, 50, 75, 100
10, 20, 30, 40, 50, 75, 100, 125
10, 20, 30, 40, 50, 75, 100, 125, 150
10, 20, 30, 40, 50, 75, 100, 125, 150
Nil
S
n
Bore size/Stroke (mm)
6
8
12
16
20
25
Number of auto switches
2 pcs.
1 pc.
"n" pcs.
Auto switch
Nil Without auto switch (Built-in magnet)
∗For the applicable auto switch model, refer to the table below.
Nil
L
Symmetric type
Standard
Symmetric
13-
22-
MXQ
1222
50
M9N
MXQ
1213
50
M9N
Copper, fluorine and silicone-free +
Low particle generation
22
Vacuum suction type
Clean series
13
Vacuum suction type (Special treatment on guide)
Refer to page 889 for the applicable auto switch list.
Symbol
Nil
TN
TF
Port thread type
Type
M thread
Rc
NPT
G
Bore size
ø6 to ø16
ø20, ø25
ø20, ø25
ø20, ø25
RoHS
799
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